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Department of Chemistry
Research
Core Facilities and Research Centers
Cleanroom
Instruments
Cleanroom
Introduction
Instruments
Arias custom design
LANZ VPO 50
EVG501 Wafer Bonding System
EVG 610 mask aligner
Nanonex NX-2600 nanoimprint lithography (NIL)
NSM laminator 172
Cryofox Explorer 500 GLAD (Glancing Angle Deposition)
SPTS Pegasus
Reactive ion etcher (RIE)
Bruker Dimension Edge atomic force microscope (AFM)
FEI Magellan 400 SEM and Raith electron beam lithography
Bruker DektakXT stylus profiler
Zeiss Axio Scope A1 material microscope
Thermco M2454 4-stack oven
Sentech SE 850 PV spectroscopic ellipsometer
Custom built fumehoods from Arias Gmbh.
Cryofox PECVD cluster system
Projects
Publications
Staff
WPA/APV
Instruments
Arias custom design
LANZ VPO 50
EVG501 Wafer Bonding System
EVG 610 mask aligner
Nanonex NX-2600 nanoimprint lithography (NIL)
NSM laminator 172
Cryofox Explorer 500 GLAD (Glancing Angle Deposition)
SPTS Pegasus
Reactive ion etcher (RIE)
Bruker Dimension Edge atomic force microscope (AFM)
FEI Magellan 400 SEM and Raith electron beam lithography
Bruker DektakXT stylus profiler
Zeiss Axio Scope A1 material microscope
Thermco M2454 4-stack oven
Sentech SE 850 PV spectroscopic ellipsometer
Custom built fumehoods from Arias Gmbh.
Cryofox PECVD cluster system
Revised 10.08.2026
-
Fie Noer Christensen
