Instruments

• 4-inch sputter system
• Arias custom design
• LANZ VPO 50
• EVG501 Wafer Bonding System
• EVG 610 mask aligner
• Nanonex NX-2600 nanoimprint lithography (NIL)
• NSM laminator 172
• Cryofox Explorer 500 GLAD (Glancing Angle Deposition)
• SPTS Pegasus
• Reactive ion etcher (RIE)
• Bruker Dimension Edge atomic force microscope (AFM)
• FEI Magellan 400 SEM and Raith electron beam lithography
• Bruker DektakXT stylus profiler
• Zeiss Axio Scope A1 material microscope
• Thermco M2454 4-stack oven
• Sentech SE 850 PV spectroscopic ellipsometer
• Custom built fumehoods from Arias Gmbh.
• Cryofox PECVD cluster system